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(2017 - 2013 ):

2017

  1. Evstafev, S., Timoshenkov, S., Samoilykov, V., Korobova, N. Fabrication of a reflecting mems-element based on a thermal micromechanical actuator. Int. Multidisciplinary Scient. GeoConf. Surveying Geology and Mining Ecology Manag., SGEM- 2017. 17(61), p.133-140
  2. Timoshenkov, S., Korobova, N., Evstafev, S., Mikheev, A. Calibration of the inertial sensors in real time. Int. Multidisciplinary Scient. GeoConf. Surveying Geology and Mining Ecology Management, SGEM --2017. 17(61), p.35-41
  3. S. Timoshenkov, N. Korobova, A. Mikheev, A. Timoshenkov. Development of MEMS Angular Rate Sensor with Self-calibration Function International Conference "Actual Issues of Mechanical Engineering" 2017 (AIME 2017). Series: Advances in Engineering Research. Vol.133, p.860-865
  4. S. Timoshenkov, N. Korobova, V. Kalugin, A. Shalimov et al. Providing of MEMS Inclinometer Operation Under External Influencing Factors. IEEE 36rd Int. Scientific Conf. Electronics and Nanotechnology, ELNANO-2017 Proc.ELNANO-2017, IEEE. 18-20 April, Kyev..88-91 Novikov, S.N., Korobova, N.E., Timoshenkov, S.P., Goryunova, E.P. Influence of thin glass films coherence on the Schottky and Rebinder effects in sensors. 13th International Conference on Films and Coatings. St. Petersburg; Russian Federation; 18 April 2017 20 April 2017. Journal of Physics: Conference Series. Volume 857, Issue 1, 1 June 2017
  5. Korobova, N.E., Timoshenkov, S.P. Electro-physical and mechanical properties of films based on zirconium oxide in sensitive elements of MEMS 13th International Conference on Films and Coatings.St. Petersburg; Russian Federation; 18 April 2017 20 April 2017 Journal of Physics: Conference Series. Volume 857, Issue 1, 1 June 2017.

2016

  1. Lazarenko P.I., Sherchenkov A.A., Kozyukhin S.A., Babich A.V., Nguen H.P., Timoshenkov S.P., Gromov D.G., Yakubov A.O., Terekhov D.Y. Influence of indium doping on the electrical properties of Ge2Sb2Te5 thin films for nonvolatile phase change memory devices. Journal of Physics: Conference Series. 2016. Vol. 690. P. 012006.
  2. V.S. Minaev, S.P. Timoshenkov, V.P. Vassiliev, E.V. Aleksandrovich, V.V. Kalugin, N.E. Korobova. The concept of polymer nano-heteromorphic structure and relaxation of the glass-forming substance by chalcogenides, oxides and halides example. Some results and perspective. Journal of optoelectonics and advanced materials 2016. Vol. 18. P. 10-23.
  3. Novikov, S.N., Timoshenkov, S.P., Korobova, N.E., Goryunova, E.P. Enhancement of the Schottky Effect in a Si(100) - Water System Using Porous Polymeric Track-Etched Membranes. Russian Journal of Physical Chemistry A April 2016. Vol. 90, Is. 4 P. 856-860.
  4. Novikov, S.N., Timoshenkov, S.P., Minaev, V.S., Goryunova E.P., Gerasimenko, N.N., Smirnov, D.I. Nanoporosity of Si (100) Bars. Russian Journal Of Physical Chemistry A September 2016. P. 1869-1874.
  5. Novikov, S.N., Ermolaeva, A.I., Timoshenkov, S.P., Korobova, N.E., Goryunova, E.P. Effect of porous polymer films (track membranes) on the isothermal evaporation kinetics of water. Russian Journal of Physical Chemistry A April 2016. P. 856-860.
  6. Babich, A.V., Sherchenkov, A.A., Kozyukhin, S.A., Timoshenkov, S.P. Investigation of the crystallization kinetics in Ge-Sb-Te-Bi thin films for phase change memory application. Acta Physica Polonica A 2016. P. 717-720.
  7. Babich, A., Sherchenkov, A., Kozyukhin, S. , Lazarenko, P., Timoshenkov, S., Boytsova, O. Investigation of the crystallization kinetics in Ge-Sb-Te-Bi and Ge-Sb-Te-In phase-change memory materials. Journal of optoelectronics and advanced materials. 2016. P. 235-239.
  8. Sherchenkov, A. , Kozyukhin, S., Lazarenko, P., Babich, A., Timoshenkov, S., Gromov, D., Yakubov, A., Terekhov, D. Influence of Ti doping on the properties of Ge-Sb-Te thin films for phase change memory. Solid State Phenomena 2016. P. 235-239.
  9. V. Kravtsova; M. Umerzakova; N. Korobova; S. Timoshenkov; V. Timoshenkov; S. Orlov; R. Iskakov; O. Prikhodko. Electro-optical and physic-mechanical properties of colored alicyclic polyimide Proc. SPIE, Light Manipulating Organic Materials and Devices III September 23, 2016. Conference Vol. 9939. P. 229-236.
  10. P. Lazarenko, A. Sherchenkov, S. Kozyukhin, A. Babich, S. Timoshenkov, A. Shuliatyev, V. Kudoyarova. Electrical properties and transport mechanisms in Ge-Sb-Te thin films Journal of optoelectonics and advanced materials 1-2 January-February 2016. Vol. 18. P. 50-55.
  11. Sherchenkov, A., Lazarenko, P., Babich, A., Korobova, N., Timoshenkov, S., Yakubov, A., Terekhov, D., Shuliatyev, A., Kozyukhin, S., Boytsova, O. Electrical properties and transport mechanisms in Ge-Sb-Te thin films for nanoelectronics. "16th international multidisciplinary scientific geoconference & EXPO SGEM, Jun 28-Jul 7 2016" Albena, Bulgaria, 2016. P. 229-236.

2015

  1. E. Kochurina, S. Timoshenkov, N. Korobova, Y. Chaplygin, S. Anchutin, A. Kosolapov, Research and development of capacitive transducer with linear acceleration, Proceedings SPIE Microtechnologies -2015, 4-6 Barcelona, pp. 1-6.
  2. O. Britkov, S.Timoshenkov, N. Korobova, S. Shepelev, A. Mikheev Features design and manufacturing technology in micro-electromechanical encapsulated devices, Proceedings SPIE Microtechnologies -2015, 4-6 Barcelona, pp. 7-13.
  3. A.Sherchenkov, S.Kozyukhin, P. Lazarenko, A.Babich, S.P.Timoshenkov, N.E.Korobova, A.Yakubov, D.Terekhov, O.Boytsova, Electrical Properties and Transport Mechanisms in Ge-Sb-Te Thin Films for Nanoelectronics, Proceedings IEEE 15th International Conference on Nanotechnology -2015, 27-30 July Roma, pp. 120-124.
  4. Andrew Shalimov, SergeyTimoshenkov, Natalia Korobova, Maxim Golovinskiy, Alexey Timoshenkov, Egor Zuev, Svetlana Berezueva, Andrey Kosolapov, Comb structure analysis of the capacitive sensitive element in MEMS accelerometer, Proceedings SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94672W (May 22, 2015); doi:10.1117/12.2176815;
  5. N. Korobova, S. Timoshenkov, O. Britkov, S.Shepelev, A. Mikheev, Packaging Problem in Microelectronics Due to Stress and Fracture at the Metal-Ceramic Interface, Proceedings 2015 IEEE 35rd International Scientific Conference Electronics and Nanotechnology, ELNANO-2015, IEEE. 21-24 April, Kyev, pp.234-238
  6. N. Korobova, S. Timoshenkov, E. Artemov, G. Kosolapova, V. Petrova, Preparation and Some Properties of Pure and Doped Barium Titanate Thin Films, Proceedings 2015 IEEE 35rd International Scientific Conference Electronics and Nanotechnology, ELNANO-2015, 21-24 April, Kyev, pp.239-243.

2014

  1. D. Vertyanov, S. Timoshenkov, A. Golishnikov, E. Nazarov, M. Putrya, N. Korobova, D. Kostyukov Deep Plasma Etching Process Investigation of Polyimide Materials for Forming Interlayer Connections in Microelectronic Nodes// 2014 IEEE XXXIV International Scientific Conference Electronics and Nanotechnology (ELNANO) .54-58
  2. Timoshenkov S., Ermolaeva A., Koshelev N., Korobova N. Synthesis of glassy materials in high-frequency induction plasma// Int. Conf. SiO2, Advanced Dielectrics and Related Devices, X International Symposium, Cagliari (Italy), 16-18 June 2014. Citation: AIP Conference Proceedings 1624, . 147-153. (2014); doi: 10.1063/1.4900471
  3. Korobova N., Timoshenkov S. Peculiarities of amorphous and crystalline oxide films prepared by sol-gel method// III . . . , , 15-16 2014 , , c.143-144
  4. Novikov S., Timoshenkov S., Korobova N. Effect of Water Adsorbed by Nano-relief of Si (100) Surface// 2014 International conference on Future Information & Communication Engineering ICFICE 2014). 26th ~ 28th June 2014 Kowloon, Hong Kong. P.279-287.
  5. . Yu. Dolgovykh, A. Pogalov, G. Blinov, S. Timoshenkov and N. Korobova Mounting Uncased Multi-connection Integrated Circuits with Ball Contacts on Flexible Polyimide Board// 2014 International conference on Future Information & Communication Engineering ICFICE 2014). 26th ~ 28th June 2014 Kowloon, Hong Kong. P.288- 291.
  6. Timoshenkov S., Kalugin V., Mukimov D., Korobova N. nalysis of the effect of geometric errors on the MEMS sensor parameters// 2014 International conference on Future Information & Communication Engineering ICFICE 2014). 26th ~ 28th June 2014 Kowloon, Hong Kong. P.267-270.
  7. Korobova N., Timoshenkov S., Mikhaylova M., Prikhodko O., Dusembayev S., Tsendin K. Thermal properties and stability of amorphous metal doped Ge2Sb2Te5 films // International Symposium on Non-Oxide and New Optical Glasses, ISNOG 2014. 24-28 August, 2014. Jeju, South Korea. P.2-24.
  8. N. Korobova, N. Almasov, O. Prikhodko, S. Timoshenkov, K. Tsendin. Structural ordering of amorhous metal doped As-S-Se films and role of thermal. 19th international symposium on Non-Oxide and New optical glasses august 24-28, 2014, Ramada Plaza Hotel, Republic of Korea. 2014. P2-25.
  1. Korobova N., Almasov N., Prikhodko O., Timoshenkov S., Tsendin K. Efficient Method f Structural And Electronic Properties Modification Of Amorphous As-S-Se Chalcogenide Films. Materials Science and Technology (MS&T) 2014October 12-16, 2014 , Pittsburgh, Pennsylvania USA. P. 753-758
  2. Korobova N., Timoshenkov S., Mukimov D. New piezoelectric film materials for MEMS electronic devices// Materials Science and Technology (MS&T) 2014 October 12-16, 2014, Pittsburgh, Pennsylvania, USA, P. 127-131
  3. Yu. Dolgovykh, A. Pogalov, G. Blinov, S. Timoshenkov, N. Korobova How to increase reliability of frameless PCB based on the organic substrates. Proc. ICMNE-214, P2-17// International Conference Micro-and Nanoelectronics -2012 ( October 6-10, 2014) Moscow Zvenigorod, Russia.

2013

  1. Korobova, N.,Timoshenkov, S.,Vodopyanov, V. Manufacturing, structure and properties of PZT coatings produced by electrophoretic deposition on different sample layers (2014)Materials Science and Technology Conference and Exhibition 2013, MS and T 20134PP. 2656 - 2662
  2. Korobova N., Vodopyanov, V.,Stepanova, Y.,Cherkasova, Y.,Timoshenkov, S.,Plis, N.,Isaikina, O. Functional film peculiarities of the Metal-Insulator Metal structure devices- 2013 IEEE XXXIII Int. Conf. Electronics and nanotechnology (ELNANO), 2013. 16-19 April, Kyiv, Ukraine, p.112-114 doi: 10.1109/ELNANO.2013.6552026
  3. robova N., Timishenkov, S.,Vodopyanov, V.,Stepanova, Y.,Cherkasova, Y.,Preparation and application of PZT films in microelectronics in Future information communication technology and applications. ICFICE2013 //Eds. Hoe-Kyung Jung et al./- Part 5, Chapter 54. Springer P.483 -490. doi: 10.1007/978-94-007-6516-0_54
  4. Korobova, N., Timoshenkov, S.,Titov, A.,Dolgovykh, Y.,Tikhonov, K.,Naing, S.M.,Angular rate sensors with conformal flexible multilayer polymer wiring boards, (2013)Advanced Materials Research630PP. 344 - 347 doi: 10.4028 /www.scientific.net/ AMR.630.344
  5. ., .. - // 11- . -2013. 6-8 2013, ., .113-115.
  6. ., ., ., ., . - , , // 11- . -2013. 6-8 2013, ., .116-118.
  7. Natalia Korobova, Veniamin Vodopyanov, Sergey Timoshenkov Structure peculiarities of different functional oxide films prepared from metal alkoxide solutions// 12 International conference on the Structure of non-crystalline materials. 2013. July 7-12, Riva Del Garda-Italy.
  8. S.P. Timoshenkov, V. Vodopianov, Yu Stepanova, Yu. Cherkasova, N. Korobova How to get high-quality PZT films for microelectronics // Proc. Second Asian School-Conference on Physics and Technology of Nanostructured Materials. Vladivostok, Russia. 2027 August, 2013. P. 255

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